JPH0520502B2 - - Google Patents

Info

Publication number
JPH0520502B2
JPH0520502B2 JP58090296A JP9029683A JPH0520502B2 JP H0520502 B2 JPH0520502 B2 JP H0520502B2 JP 58090296 A JP58090296 A JP 58090296A JP 9029683 A JP9029683 A JP 9029683A JP H0520502 B2 JPH0520502 B2 JP H0520502B2
Authority
JP
Japan
Prior art keywords
gas
bottomed cylindrical
amorphous silicon
internal unit
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58090296A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59217615A (ja
Inventor
Hideji Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP9029683A priority Critical patent/JPS59217615A/ja
Publication of JPS59217615A publication Critical patent/JPS59217615A/ja
Publication of JPH0520502B2 publication Critical patent/JPH0520502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP9029683A 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置 Granted JPS59217615A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9029683A JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9029683A JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Publications (2)

Publication Number Publication Date
JPS59217615A JPS59217615A (ja) 1984-12-07
JPH0520502B2 true JPH0520502B2 (en]) 1993-03-19

Family

ID=13994569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9029683A Granted JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Country Status (1)

Country Link
JP (1) JPS59217615A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2641193B2 (ja) * 1986-03-20 1997-08-13 キヤノン株式会社 堆積膜製造装置
JP6965942B2 (ja) 2017-12-22 2021-11-10 株式会社村田製作所 成膜装置
JP6988916B2 (ja) 2017-12-22 2022-01-05 株式会社村田製作所 成膜装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192258A (en) * 1981-05-19 1982-11-26 Oki Electric Ind Co Ltd Film forming apparatus using glow discharge
JPS5953672A (ja) * 1982-09-21 1984-03-28 Canon Inc プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPS59217615A (ja) 1984-12-07

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